To provide a technique capable of producing a fine structure only by diamond film deposition without using an etching process for diamond regarding a seeding treating method to a substrate, a diamond fine structure obtained by subjecting the surface of the obtained diamond-seeded substrate to diamond crystal growth, and a method for producing the same.

Disclosed is a seeding treatment method of diamond particulates to a substrate P1 in which only the specified part of a substrate is subjected to seeding, wherein seeding is performed only to the surface of the substrate which has been subjected to oxygen terminal treatment, and the surface of the substrate which has been subjected to hydrogen terminal treatment is not subjected to seeding, by using nano diamond fine particles. Also disclosed are a diamond fine structure obtained by subjecting the surface of the obtained diamond-seeded substrate to diamond crystal growth, and a method for producing the same.