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Title:
SEISMIC ISOLATION DEVICE AND EXPOSURE SYSTEM
Document Type and Number:
Japanese Patent JP2011108984
Kind Code:
A
Abstract:

To provide a seismic isolation device capable of suppressing damage due to vibration of an earthquake or the like, and to provide an exposure system.

The seismic isolation device includes: a pedestal for mounting an object; and a hanging mechanism for hanging the pedestal in the gravity direction to support. The hanging mechanism HN is formed of a material with high rigidity, such as a metal, in a rod shape. The hanging mechanism HN is arranged so as to extend in the Z direction, and, for example, is embedded in each pillar member 83. An end on +Z side of the hanging mechanism HN is connected, for example, to a ceiling CL, and an end on -Z side is connected to a corner block 82 of a base plate BP.


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Inventors:
YAMAMOTO KOJI
TAKAHASHI MASATO
UMEZAWA KAORI
IWATSUKI EMI
Application Number:
JP2009264796A
Publication Date:
June 02, 2011
Filing Date:
November 20, 2009
Export Citation:
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Assignee:
NIKON CORP
International Classes:
H01L21/027; F16F15/02
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Kazuya Nishi



 
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