Title:
SELECTIVE ETCHING METHOD
Document Type and Number:
Japanese Patent JPS5372462
Kind Code:
A
Abstract:
PURPOSE:To increase the etching speed for the etched parts by ion injection.
Inventors:
MORITA TADAHISA
Application Number:
JP14777376A
Publication Date:
June 27, 1978
Filing Date:
December 10, 1976
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H01L21/306; H01L21/302; (IPC1-7): H01L21/302