To provide an electron source device for emitting a thinly focused electron beam.
This self-aligned electron source device includes novel structure and material for an electron emitting device. This device can be used in a newest memory system and comprises emitter, extraction, and focus electrodes separated by dielectric layers. A single cavity extending through the electrodes and dielectric layers and terminating at the emitter electrode is formed in a single photolithographing and etching process. A composite emitter comprising a base on the emitting electrode and a conical end part disposed on the base and terminating at a vertex is formed in the cavity. The base can be made of a material containing titanium or chromium. The end can be made from a wide variety of materials including heat resisting metals and electrocastable metals. The cavity and the composite emitter are self-aligned with each other. The dielectric layers can be etching so as to reduce or remove electric charge stored on their surfaces facing on the cavity. The dielectric layers can be formed by using composite layers each including an insulating and mechanical-strength reinforcing layer and a pullback layer.
BIRECKI HENRYK
KUO HUEI-PEI
NABERHUIS STEVEN L
