Title:
自立膜、積層シート、及び自立膜の製造方法
Document Type and Number:
Japanese Patent JP7424652
Kind Code:
B2
Abstract:
Provided are: a self-supporting film that exhibits low electric resistance, low thermal resistance, and high mechanical strength, has excellent heat resistance and flexibility, and can be produced at low cost; a laminated sheet; and a method for manufacturing a self-supporting film. A self-supporting film 1 has a porous structure consisting of an aggregate 3 of metal particles 2 and voids 4. A method for manufacturing a self-supporting film 1 comprises: evaporating a metal in an inert gas of 10-300 Torr; generating metal particles 2 composed of the metal; depositing the metal particles 2 on a substrate; forming on the substrate a self-supporting film precursor having a porous structure consisting of an aggregate 3 of the metal particles 2 and voids 4; and peeling the self-supporting film precursor from the substrate. A laminated sheet comprises a self-supporting film 1 having a porous structure consisting of an aggregate 3 of metal particles 2 and voids 4, and a carrier substrate.
Inventors:
Yuu Noda
Sebumi Munakata
Sebumi Munakata
Application Number:
JP2021184864A
Publication Date:
January 30, 2024
Filing Date:
November 12, 2021
Export Citation:
Assignee:
Waseda University
International Classes:
H01L23/36; B22F1/00; B22F1/05; B22F1/148; B22F3/11; H01L23/373
Domestic Patent References:
| JP2007151805A | ||||
| JP2016169411A |
Attorney, Agent or Firm:
Patent Attorney Corporation Dorait International Patent Office
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