Title:
SEMICONDUCTOR ACCELERATION SENSOR AND ITS MANUFACTURE
Document Type and Number:
Japanese Patent JPH09318655
Kind Code:
A
Abstract:
To provide a very small semiconductor acceleration sensor having an amplifying function in element itself and a high SN ratio and its manufacture.
This semiconductor acceleration sensor 100 includes a mass part 14a and beam parts 14b and 14c for supporting this mass part 14a, and a piezo resistance effect by distortion produced in the beam parts 14b and 14c by the displacement of the mass part 14a is utilized. The beam part 14b and 14c are at least composed of a part of he base region 14 of a bipolar transistor and, by utilizing the change of a base resistance made by the piezo resistance effect, the output of the bipolar transistor is detected so as to measure acceleration.
Inventors:
KIGAMI MASAHITO
Application Number:
JP15486696A
Publication Date:
December 12, 1997
Filing Date:
May 27, 1996
Export Citation:
Assignee:
TOYOTA CENTRAL RES & DEV
International Classes:
G01P15/12; H01L21/331; H01L29/73; H01L29/732; H01L29/84; (IPC1-7): G01P15/12; H01L21/331; H01L29/73; H01L29/84
Attorney, Agent or Firm:
布施 行夫 （外２名）
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