SEMICONDUCTOR ACCELERATION SENSOR

Title:

SEMICONDUCTOR ACCELERATION SENSOR

Document Type and Number:

Japanese Patent JP2003172745

Kind Code:

A

Abstract:

To provide a highly-sensitive, subminiature and thin semiconductor acceleration sensor.

This semiconductor acceleration sensor is equipped with a mass part formed on the center part of a semiconductor substrate, a frame part formed on the peripheral part of the semiconductor substrate, thin-walled elastic parts provided over the mass part and the frame part, for connecting the mass part to the frame part, and plural pairs of piezo resistance elements formed on the upper face side of the elastic parts. In the sensor, two pairs of notches having respectively a rectangular parallelpiped shape having the width wider than the width of the elastic body are provided on the mass part, and the mass part is connected to the two pairs of the elastic parts on the upper face side of the two pairs of the notches.

Inventors:

SAITO MASAKATSU
TANAKA SHIGENORI
IKEDA YOSHIO

Application Number:

JP2001363371A

Publication Date:

June 20, 2003

Filing Date:

November 28, 2001

Export Citation:

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Assignee:

HITACHI METALS LTD

International Classes:

B81B3/00; G01P15/08; G01P15/12; G01P15/18; G01P15/00; H01L29/84; (IPC1-7): G01P15/12; G01P15/18; H01L29/84

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