PURPOSE: To prevent the welding of a silicon movable electrode and a fixing electrode occurring in spite of the connection/disconnection of the power source of a sensor by arranging the fixed electrodes on upper and lower glass plates separately from the terminal of a silicon movable electrode arranged in the center of laminate structure.

CONSTITUTION: A capacitance type acceleration sensor is formed by laminating the upper glass plate 2 and the lower glass plate 3 for a center silicon plate 1. The termi nal parts 15 of the fixed electrodes 4, 6 arranged at the glass plates 2, 3 are set by deviating from a corresponding part 14 where the terminal part 13 of the movable electrode 5 formed at the tip of the silicon plate 1 comes in contact with the glass plates 2, 3. Thereby, no contact of the electrode 5 with the electrodes 4, 6 occurs even when an electrostatic force is applied from the outside when the power source is connected or disconnected. Only the contact of the terminal part 13 with the corre sponding part 14 occurs, and no welding occurs. It is because that the glass plates 2, 3 with which the terminal part 13 comes in contact at the corresponding part 14 are insulators, and the corresponding part 14 is separated from the conductors of the electrodes 4, 6. Also, the welding can be prevented without reducing the areas of the electrode 5 and the gap 12 for capacitance detection.