PURPOSE: To prevent the contact of a fixed electrode with a movable electrode by a simple laminated structure by arranging the cantilever connected to the movable electrode at the same position as the taking-out electrode part of the fixed electrode.

CONSTITUTION: A cantilever 2 and a taking-out electrode 8 are arranged at the same position and the opposed positions of the leading end parts 11 of fixed electrodes and the leading end part 12 of a movable electrode are shifted. By this method, the movable electrode 3 does not simply come into contact with the fixed electrodes 4, 5 and manufacturing is easy and reliability is enhanced.