PURPOSE: To detect acceleration in three-dimensional coordinate system represented by X, Y, and Z axes.
CONSTITUTION: When an acceleration sensor A is subjected to an acceleration G in X-axis direction, all piezo resistors RX1-RX4, RY1-RY4, RZ1-RZ4 are subjected to tensile stress and resistances of the piezo resistances RX1, RX3 decrease whereas resistances of other piezo resistors increase. When these resistors are constituted into a bridge, output is obtained only from a bridge for detecting the acceleration G in X-axis and zero output is produced from bridges for detecting the acceleration G in Y-axis and Z-axis. Similarly, output is obtained only from a bridge for detecting the acceleration G in Y-axis or Z-axis for the acceleration G functioning in Y-axis or Z-axis and zero output is produced from two other bridges. This constitution allows independent detection of acceleration in three axial directions.
KASANO FUMIHIRO
ICHIYA MITSUO
HAMAOKA TETSUYA
TANIGUCHI NAOHIRO
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