Title:
SEMICONDUCTOR ALIGNER
Document Type and Number:
Japanese Patent JP2003158060
Kind Code:
A
Abstract:
To operate a program rightly without individually corresponding to a processing program when control codes depending on a hardware and information peculiar to a user are contained in a reticle and a reticle cassette bar code, which are read in order to refer whether a reticle carried in an aligner is a designated reticle to be used in an exposure treatment.
The semiconductor aligner is provided with mask information wherein an unnecessary information part in bar code information, such as the control codes and the information peculiar to a user are described, and a means for discarding unnecessary bar code information by referring the mask information.
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Inventors:
KASAI KOREYUKI
Application Number:
JP2001356963A
Publication Date:
May 30, 2003
Filing Date:
November 22, 2001
Export Citation:
Assignee:
CANON KK
International Classes:
G03F1/38; G03F7/20; H01L21/027; (IPC1-7): H01L21/027; G03F1/08; G03F7/20
Attorney, Agent or Firm:
Takanashi Yukio