Title:
SEMICONDUCTOR ALIGNER
Document Type and Number:
Japanese Patent JP3441870
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To eliminate the effects of the dust generated by a printer on a semiconductor aligner.
SOLUTION: A semiconductor aligner 5 constituted of a main body and a work station which controls the device and outputs necessary information as a printed data is provided with a small-size computer 8, portable if possible, which receives the printed data and stores or outputs it to a portable storage medium and displays it on the medium. Or, the device 5 is provided with a wireless communication means, being composed of a fax modem 13 and a portable telephone 14, which outputs the printed data on a fax machine 15 located at a place 11 away from the main body of the semiconductor aligner.
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Inventors:
Toshiyuki Shigaraki
Application Number:
JP2162396A
Publication Date:
September 02, 2003
Filing Date:
January 16, 1996
Export Citation:
Assignee:
Canon Inc
International Classes:
H01L21/027; (IPC1-7): H01L21/027
Domestic Patent References:
| JP470753A | ||||
| JP546155A | ||||
| JP6347396A | ||||
| JP62203333A | ||||
| JP63122913A |
Attorney, Agent or Firm:
Tetsuya Ito