To detect the molecules of nucleic acid or nucleic acid derivative with high sensitivity, by arraying the detection section of the molecule of the nucleic acid or nucleic acid derivative with high density.
The semiconductor array sensor forms a plurality of detection sections 14a by a minute spot-like lightly-doped semiconductor layer at each independent specified position on a smooth conductive substrate 12, and laminates a semiconductor 14 for surrounding the detection section 14a with a heavily-doped semiconductor layer 14b. An insulator layer 16 is laminated on the semiconductor layer 14, and a molecular probe 18 is fixed at a position of the detection section 14a on the insulating layer 16. A container 20, provided at the outer periphery on the insulator layer 16, is filled with a conductive liquid 22. A reference electrode 24 is inserted into it. An ohmic electrode 26 is fixed under the conductive substrate 12, and a power supply 28 and an ammeter 30 are connected in series between the reference electrode 24 and the ohmic electrode 26. An LED 34, for irradiating the molecular probe 18 with irradiation light 32 passing through the conductive liquid 22, is arranged at the upper section of the conductive liquid 22.
Yoshiaki Naito
Cui Shu Tetsu