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Patent Searching and Data


Title:
SEMICONDUCTOR CRYSTAL GROWTH METHOD
Document Type and Number:
Japanese Patent JPH06224123
Kind Code:
A
Abstract:

PURPOSE: To provide a semiconductor crystal growth method, with which a segregation can be effectively reduced, suitable for formation of a sharp interface.

CONSTITUTION: The title semiconductor crystal growth method is the method with which semiconductor crystal with which the second semiconductor layer 2, having at least partially different composision, will be grown on the first semiconductor layer. This method is composed of a process in which the surface of the first semiconductor layer 1 is coated with an almost uniform hydrogen atom layer 3, and a process in which the raw material of the second semiconductor layer 2 is fed, and the second semiconductor layer 2, consisting at least of one atom layer, is grown on the surface of the first semiconductor layer 1 by the segregation of hydrogen atoms.


Inventors:
MAEDA TAKESHI
Application Number:
JP836093A
Publication Date:
August 12, 1994
Filing Date:
January 21, 1993
Export Citation:
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Assignee:
FUJITSU LTD
International Classes:
H01L21/203; C30B23/08; (IPC1-7): H01L21/203
Attorney, Agent or Firm:
Keishiro Takahashi