Title:
半導体検出素子および検出方法
Document Type and Number:
Japanese Patent JP4203617
Kind Code:
B2
Inventors:
Koji Yamaguchi
Hirayama Shoro
Tatsushi Akasaki
Hirayama Shoro
Tatsushi Akasaki
Application Number:
JP2004065940A
Publication Date:
January 07, 2009
Filing Date:
March 09, 2004
Export Citation:
Assignee:
Nippon Telegraph and Telephone Corporation
International Classes:
G01L1/18; H01L29/84
Domestic Patent References:
| JP1148928A | ||||
| JP3277902A | ||||
| JP9139509A | ||||
| JP64036003A | ||||
| JP4029381A | ||||
| JP10313137A |
Attorney, Agent or Firm:
Michio Takayama
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