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Title:
SEMICONDUCTOR DEVICE INCLUDING DOUBLE GATE ELECTRODE STRUCTURE, AND MANUFACTURING METHOD FOR THE SAME
Document Type and Number:
Japanese Patent JP2012248841
Kind Code:
A
Abstract:

To provide a semiconductor device including a double gate electrode structure, that can increase the on current while minimizing the generation of leakage current, and provide a manufacturing method for the semiconductor device.

A semiconductor device includes: a gate electrode disposed on a substrate; a first impurity implantation region and a second impurity implantation region disposed on the substrate so that each is disposed adjacent to each end of the gate electrode; and a channel region disposed between the first impurity implantation region and the second impurity implantation region. The gate electrode includes a first sub-gate electrode adjacent to the first impurity implantation region and a second sub-gate electrode adjacent to the second impurity implantation region. The first sub-gate electrode and the second sub-gate electrode are disposed on the channel region. In this semiconductor device, one channel region is independently controlled by the two sub-gates, so that the generation of leakage current can be minimized.


Inventors:
KIM JI-YOUNG
OH YONG-CHUL
WOO DONG-SOO
CHUNG HYUN WOO
JIN GYO-YOUNG
CHOI SEONG-KWAN
HONG HYEONG-SUN
HWANG YOO-SANG
Application Number:
JP2012118686A
Publication Date:
December 13, 2012
Filing Date:
May 24, 2012
Export Citation:
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Assignee:
SAMSUNG ELECTRONICS CO LTD
International Classes:
H01L21/336; H01L21/8242; H01L21/8244; H01L21/8246; H01L21/8247; H01L27/105; H01L27/108; H01L27/11; H01L27/115; H01L29/78; H01L29/788; H01L29/792
Attorney, Agent or Firm:
Hatta International Patent Corporation