Title:
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
Document Type and Number:
Japanese Patent JP3263429
Kind Code:
B2
Abstract:
PURPOSE: To provide a semiconductor device which suitably operates as an electronic memory of a computer and its manufacture, and to shorten its access time.
CONSTITUTION: A capacitor 2 which consists of a lower electrode 11, an oxygen containing ferroelectric 12, and an upper electrode 13 and does not have the edge part of the ferroelectric covered with the upper electrode is provided on the top surface 10 of a semiconductor main body 3 and then when an insulating layer 14 on which metal thin conductors are superposed is provided, the ferroelectric 12 which is not coated with the upper electrode 13 is coated with a coating layer 14 which is impermeable hydrogen practically and then the device is heated in a hydrogen containing atmosphere.
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Inventors:
Robertas Adrinus Maria Walters
Paul Cavi Larsen
Mathieu Joseph Emanuel Ulenas
Paul Cavi Larsen
Mathieu Joseph Emanuel Ulenas
Application Number:
JP11622192A
Publication Date:
March 04, 2002
Filing Date:
May 08, 1992
Export Citation:
Assignee:
Konin Krekka Philips Electronics NV
International Classes:
H01G7/06; H01L21/02; H01L21/318; H01L21/822; H01L21/8246; H01L27/04; H01L27/105; H01L27/115; H01L29/49; (IPC1-7): H01L21/822; H01G7/06; H01L21/318; H01L27/04
Domestic Patent References:
| JP2232961A | ||||
| JP2184079A | ||||
| JP1265524A | ||||
| JP4102367A |
Attorney, Agent or Firm:
Akihide Sugimura (5 outside)
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