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Patent Searching and Data


Title:
SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2004265983
Kind Code:
A
Abstract:

To provide a semiconductor device which can specify whether failure occurred in which source position of a semiconductor substrate only by checking a semiconductor chip divided from the semiconductor substrate when failure occurs in the semiconductor chip, and to provide its manufacturing method.

In the semiconductor device which can specify a failure occurrence position in a semiconductor substrate 1 after semiconductor chips 2 arranged in a matrix shape in the semiconductor substrate 1 are divided, the semiconductor chip 2 is provided with a circuit 3, a common mark 4 which is formed in a region except the circuit 3 and shows the whole lay out of the semiconductor chips 2 in the semiconductor substrate 1, and an individual mark 5 which is formed in the common mark 4 and shows position of the semiconductor chip 2 in the semiconductor substrate 1.


Inventors:
NISHIHATA TOSHIHIKO
Application Number:
JP2003052751A
Publication Date:
September 24, 2004
Filing Date:
February 28, 2003
Export Citation:
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Assignee:
VICTOR COMPANY OF JAPAN
International Classes:
G03F7/20; H01L21/02; H01L21/027; H01L21/66; H01L21/822; H01L27/04; (IPC1-7): H01L21/02; G03F7/20; H01L21/027; H01L21/66; H01L21/822; H01L27/04