Title:
Semiconductor device and its manufacturing method
Document Type and Number:
Japanese Patent JP5985337
Kind Code:
B2
Inventors:
Koji Ishikura
Application Number:
JP2012215346A
Publication Date:
September 06, 2016
Filing Date:
September 28, 2012
Export Citation:
Assignee:
Renesas Electronics Corporation
International Classes:
H01L21/338; H01L21/337; H01L27/098; H01L29/778; H01L29/808; H01L29/812
Domestic Patent References:
| JP2009206123A | ||||
| JP2007201279A |
Attorney, Agent or Firm:
Yamato Tsutsui
Atsushi Sugada
Akiko Tsutsui
Tetsuya Sakaji
Atsushi Sugada
Akiko Tsutsui
Tetsuya Sakaji
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