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Title:
Semiconductor device and its manufacturing method
Document Type and Number:
Japanese Patent JP6008470
Kind Code:
B2
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Inventors:
Takefusa Kubo
Application Number:
JP2011118227A
Publication Date:
October 19, 2016
Filing Date:
May 26, 2011
Export Citation:
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Assignee:
ROHM Co., Ltd.
International Classes:
H01L29/78; H01L21/336
Domestic Patent References:
JP2006156461A
JP2003273354A
JP2006511974A
Attorney, Agent or Firm:
Inaoka cultivation
Mio Kawasaki
Kyoumura Junji



 
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