Title:
Semiconductor device and its producing method
Document Type and Number:
Japanese Patent JP5986361
Kind Code:
B2
Inventors:
Satoru Igarashi
Yonekawa Kiyotaka
Yasukazu Inoue
Yonekawa Kiyotaka
Yasukazu Inoue
Application Number:
JP2011207073A
Publication Date:
September 06, 2016
Filing Date:
September 22, 2011
Export Citation:
Assignee:
LAPIS Semiconductor Co., Ltd.
International Classes:
H01L21/336; H01L21/321; H01L21/768; H01L23/532; H01L29/06; H01L29/78; H01L29/786
Domestic Patent References:
| JP2222162A | ||||
| JP6244367A | ||||
| JP8213361A | ||||
| JP2000294763A | ||||
| JP9289305A | ||||
| JP11297996A | ||||
| JP2002353444A | ||||
| JP6104258A | ||||
| JP4287326A | ||||
| JP5175342A |
Attorney, Agent or Firm:
Minoru Maeda
Youichi Yamagata
Masahiko Shinohara
Youichi Yamagata
Masahiko Shinohara