Semiconductor device and its producing method - Mitsubishi Electric Corporation

Title:

Semiconductor device and its producing method

Document Type and Number:

Japanese Patent JP6012550

Kind Code:

B2

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Inventors:

Noriya Iwata
Tsuneo Hamaguchi
Kenichi Hayashi

Application Number:

JP2013128516A

Publication Date:

October 25, 2016

Filing Date:

June 19, 2013

Export Citation:

Assignee:

Mitsubishi Electric Corporation

International Classes:

H01L21/60

Domestic Patent References:

Attorney, Agent or Firm:

Takuji Yamada
Mitsuo Tanaka
Mikio Takeuchi

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