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Patent Searching and Data


Title:
半導体装置及びその製造方法
Document Type and Number:
Japanese Patent JPWO2012074131
Kind Code:
A
Inventors:
Naoki Banno
Munehiro Tada
Sakamoto 利司
Application Number:
JP2011078032W
Publication Date:
May 19, 2014
Filing Date:
December 05, 2011
Export Citation:
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Assignee:
NEC Corp.
International Classes:
H01L21/82; H01L45/00; H01L23/522; H01L49/00; H01L21/3205; H01L27/105; H01L21/768
Attorney, Agent or Firm:
Asamichi Kato