Title:
半導体装置、半導体装置を有する液晶表示装置、半導体装置の製造方法
Document Type and Number:
Japanese Patent JP4970622
Kind Code:
B2
Abstract:
Disclosed is an electrode film which does not exfoliate from, or diffuse into, an oxide semiconductor or an oxide thin film. An electrode layer comprises a highly adhesive barrier film being a Cu—Mg—Al thin film and a copper thin film; and an oxide semiconductor and an oxide thin film contact with the highly adhesive barrier film. With the highly adhesive barrier film having magnesium in a range of at least 0.5 at % but at most 5 at % and aluminum at least 5 at % but at most 15 at % when the total number of atoms of copper, magnesium, and aluminum is 100 at %, the highly adhesive barrier film has both adhesion and barrier properties. The electrode layer is suitable because a source electrode layer and a drain electrode layer contact the oxide semiconductor layer. A stopper layer having an oxide may be provided on a layer under the electrode layer.
Inventors:
Takazawa Satoru
Masaki Shirai
Akatsuki Ishibashi
Masaki Shirai
Akatsuki Ishibashi
Application Number:
JP2011528782A
Publication Date:
July 11, 2012
Filing Date:
August 24, 2010
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
G02F1/1368; H01L29/786; H01L21/28; H01L21/336; H01L29/417
Domestic Patent References:
| JPH1154458A | 1999-02-26 | |||
| JPH1062799A | 1998-03-06 | |||
| JP2010053445A | 2010-03-11 | |||
| JP2005190992A | 2005-07-14 |
Foreign References:
| WO2008081806A1 | 2008-07-10 |
Attorney, Agent or Firm:
Shigeo Ishijima
Hideki Abe
Hideki Abe