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Patent Searching and Data


Title:
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME
Document Type and Number:
Japanese Patent JP2012054531
Kind Code:
A
Abstract:

To provide a semiconductor device having excellent productivity and a manufacturing method of the same.

A semiconductor device 100 comprises: a silicon substrate 101; and an N-type transistor 200 and a P-type transistor 202 provided on the same silicon substrate 101. The N-type transistor 200 and the P-type transistor 202 each includes a high dielectric constant gate insulator 108 containing Hf and a TiN film 110 provided on the high dielectric constant gate insulator 108. The N-type transistor 200 includes an La-added SiO2 film 109a between the silicon substrate 101 and the high dielectric constant gate insulator 108. The P-type transistor 202 includes an La-added SiO2 film 109b containing a chemical element for work function adjustment same as that contained in the N-type transistor 200 between the high dielectric constant gate insulator 108 and the TiN film 110.


Inventors:
MABE KENZO
Application Number:
JP2011076787A
Publication Date:
March 15, 2012
Filing Date:
March 30, 2011
Export Citation:
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Assignee:
RENESAS ELECTRONICS CORP
International Classes:
H01L21/8238; H01L21/283; H01L21/314; H01L27/092; H01L29/423; H01L29/49; H01L29/78
Attorney, Agent or Firm:
Shinji Hayami
Satoshi Amagi