To provide a semiconductor device and its manufacturing method capable of assuring electronic connection of a semiconductor device to an insulating substrate (mounting substrate) without conducting filler.
The semiconductor device is provided with a semiconductor element 1 with a semiconductor circuit formed thereon, an electrode 2 formed on the surface of the semiconductor element 1 and connecting to the semiconductor circuit, an insulating substrate 5, a conductor wiring 4 formed on the surface of the insulating substrate, and a conductive bump 3 in contact with the electrode 2 and the conductor wiring. The diameter of the bump 3 is relatively shorter in the side of the semiconductor element 1 than that in the side of the insulating substrate 5. The conductor wiring 4 is disposed on the insulating substrate 5, and the bump 3 is brought into contact with the electrode 2 of the semiconductor element 1 for preferable disposition after a stud bump is connected to the conductor wiring 4.
ISHIDA MIYUKI
JPH10321669A | 1998-12-04 | |||
JPH10107084A | 1998-04-24 | |||
JPH10335373A | 1998-12-18 | |||
JPH10270477A | 1998-10-09 | |||
JPH104125A | 1998-01-06 | |||
JPH09148479A | 1997-06-06 | |||
JPH08124966A | 1996-05-17 | |||
JPH11204572A | 1999-07-30 | |||
JPH0750320A | 1995-02-21 | |||
JPH06177215A | 1994-06-24 |
WO1998022980A1 | 1998-05-28 |
Next Patent: SEMICONDUCTOR INTEGRATED DEVICE