Title:
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
Document Type and Number:
Japanese Patent JP2012221973
Kind Code:
A
Abstract:
To manufacture a module of an integrated circuit using a large-capacity capacitor in a smaller size while suppressing increase in cost.
There is provided a semiconductor device comprising: an integrated circuit substrate 101 in which an integrated circuit is formed on a semiconductor substrate; and a capacitor substrate 102 including a stacked capacitor connected to the integrated circuit substrate 101 by being stacked thereon. The capacitor substrate 102 may be stacked on a side on which the integrated circuit of the integrated circuit substrate 101 is formed, and may be stacked on a side of the semiconductor substrate of the integrated circuit of the integrated circuit substrate 101.
Inventors:
TSUTSUMI TAKUYA
SUGITANI SUEHIRO
NISHIMURA KAZUMI
IDA MINORU
SUGITANI SUEHIRO
NISHIMURA KAZUMI
IDA MINORU
Application Number:
JP2011082565A
Publication Date:
November 12, 2012
Filing Date:
April 04, 2011
Export Citation:
Assignee:
NIPPON TELEGRAPH & TELEPHONE
International Classes:
H01L25/00
Domestic Patent References:
| JP2007184324A | 2007-07-19 | |||
| JPH06333740A | 1994-12-02 | |||
| JP2011035124A | 2011-02-17 | |||
| JP2006041061A | 2006-02-09 |
Other References:
JPN6014003161; 堤 卓也 Ｔａｋｕｙａ Ｔｓｕｔｓｕｍｉ: '側面コンタクトを用いたスタック型ＭＩＭキャパシタの高周波特性' 電子情報通信学会２０１０年エレクトロニクスソサイエティ大会講演論文集２ ＰＲＯＣＥＥＤＩＮＧＳ ＯＦ ＴＨＥ ２０１０ ＩＥＩＣ , 20100917, ｐ．５４
JPN6014003162; 堤 卓也 Ｔ． Ｔｓｕｔｓｕｍｉ: '新スタック型ＭＩＭキャパシタ Ｎｅｗ ｓｔａｃｋ-ｔｙｐｅ ＭＩＭ ｃａｐａｃｉｔｏｒ' ２０１０年春季第５７回応用物理学関係連合講演会講演予稿集 １９ａ-ＴＳ-１１, 20100331, ｐ．１４-１０４
CSNJ201110026054; 堤 卓也 Ｔａｋｕｙａ Ｔｓｕｔｓｕｍｉ: '側面コンタクトを用いたスタック型ＭＩＭキャパシタの高周波特性' 電子情報通信学会２０１０年エレクトロニクスソサイエティ大会講演論文集２ ＰＲＯＣＥＥＤＩＮＧＳ ＯＦ ＴＨＥ ２０１０ ＩＥＩＣ , 20100917, ｐ．５４
CSNC201108002777; 堤 卓也 Ｔ． Ｔｓｕｔｓｕｍｉ: '新スタック型ＭＩＭキャパシタ Ｎｅｗ ｓｔａｃｋ-ｔｙｐｅ ＭＩＭ ｃａｐａｃｉｔｏｒ' ２０１０年春季第５７回応用物理学関係連合講演会講演予稿集 １９ａ-ＴＳ-１１, 20100331, ｐ．１４-１０４
JPN6014003162; 堤 卓也 Ｔ． Ｔｓｕｔｓｕｍｉ: '新スタック型ＭＩＭキャパシタ Ｎｅｗ ｓｔａｃｋ-ｔｙｐｅ ＭＩＭ ｃａｐａｃｉｔｏｒ' ２０１０年春季第５７回応用物理学関係連合講演会講演予稿集 １９ａ-ＴＳ-１１, 20100331, ｐ．１４-１０４
CSNJ201110026054; 堤 卓也 Ｔａｋｕｙａ Ｔｓｕｔｓｕｍｉ: '側面コンタクトを用いたスタック型ＭＩＭキャパシタの高周波特性' 電子情報通信学会２０１０年エレクトロニクスソサイエティ大会講演論文集２ ＰＲＯＣＥＥＤＩＮＧＳ ＯＦ ＴＨＥ ２０１０ ＩＥＩＣ , 20100917, ｐ．５４
CSNC201108002777; 堤 卓也 Ｔ． Ｔｓｕｔｓｕｍｉ: '新スタック型ＭＩＭキャパシタ Ｎｅｗ ｓｔａｃｋ-ｔｙｐｅ ＭＩＭ ｃａｐａｃｉｔｏｒ' ２０１０年春季第５７回応用物理学関係連合講演会講演予稿集 １９ａ-ＴＳ-１１, 20100331, ｐ．１４-１０４
Attorney, Agent or Firm:
Masaki Yamakawa
Shigeki Yamakawa
Yuzo Koike
Shigeki Yamakawa
Yuzo Koike