Title:
Semiconductor device and method of manufacturing the same
Document Type and Number:
Japanese Patent JP5945873
Kind Code:
B2
Inventors:
Fujio Masuoka
Arai Shintaro
Hiroki Nakamura
Tomohiko Kudo
Ramana Mercy
Shen Nan Shen
Kavisa Devi Budharaju
Navab Shin
Arai Shintaro
Hiroki Nakamura
Tomohiko Kudo
Ramana Mercy
Shen Nan Shen
Kavisa Devi Budharaju
Navab Shin
Application Number:
JP2015028612A
Publication Date:
July 05, 2016
Filing Date:
February 17, 2015
Export Citation:
Assignee:
Unisantis Electronics Singapore Pte Ltd.
International Classes:
H01L21/336; H01L21/3205; H01L21/768; H01L23/522; H01L29/78; H01L29/786
Domestic Patent References:
JP2009065024A | ||||
JP2008118130A | ||||
JP5315457A | ||||
JP4237150A | ||||
JP2008072051A |
Foreign References:
US6436770 |
Attorney, Agent or Firm:
Koichi Tsujii
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Nobuyuki Taniguchi
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Nobuyuki Taniguchi