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Patent Searching and Data


Title:
SEMICONDUCTOR DEVICE AND PRODUCTION THEREOF
Document Type and Number:
Japanese Patent JPH06120458
Kind Code:
A
Abstract:

PURPOSE: To provide a semiconductor device which uses a p-type SOI substrate which does not generate n-type inversion without unnecessary process and power source for a semiconductor device which uses a laminated SOI substrate.

CONSTITUTION: A substrate with 1016cm-3 or less impurity concentration is used on the side of an activating layer 3 and an laminating SOI substrate which uses a substrate with 1018cm-3 or more p-type impurity concentration is used on the side of a supporting substrate 1. Holes 4 are accumulated at the bottom of the activating layer 3 by the Fermi level difference between the activating layer 3 and the supporting substrate 1 due to the difference between the p-type impurity concentrations and n-type reversion generated in the activating layer 3 by positive fixed charges in a bed insulating layer 2 is compensated.


Inventors:
NAMURA ITARU
Application Number:
JP27133092A
Publication Date:
April 28, 1994
Filing Date:
October 09, 1992
Export Citation:
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Assignee:
FUJITSU LTD
International Classes:
H01L21/761; H01L21/02; H01L27/08; H01L27/12; H01L21/76; (IPC1-7): H01L27/12; H01L27/08
Attorney, Agent or Firm:
Shoji Kashiwaya (1 person outside)