Title:
SEMICONDUCTOR DEVICE AND SENSOR MODULE
Document Type and Number:
Japanese Patent JP2023127298
Kind Code:
A
Abstract:
To provide a semiconductor device including a combo sensor capable of detecting gas pressure and acceleration speed.SOLUTION: The semiconductor device comprises a combo sensor. The combo sensor includes a first capacitor structure and a second capacitor structure. The first capacitor structure and the second capacitor structure have: a first change mode of electrostatic capacitance when structure deformation of first pressure tubing and second pressure tubing rotates a rotatable bar; and a second change mode of the electrostatic capacitance when the first capacitor structure and the second capacitor structure are subjected to acceleration, the second change mode different from the first change mode. Gas pressure and acceleration can be detected on the basis of a difference between the first change mode and the second change mode.SELECTED DRAWING: Figure 4
Inventors:
MARTIN HELLER
FUJITA YUSHIN
FUJITA YUSHIN
Application Number:
JP2022031006A
Publication Date:
September 13, 2023
Filing Date:
March 01, 2022
Export Citation:
Assignee:
ROHM CO LTD
International Classes:
G01L17/00; B81B3/00; G01P15/08; G01P15/125; H01L29/84
Attorney, Agent or Firm:
Patent Attorney Corporation Ai Patent Office
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