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Patent Searching and Data


Title:
SEMICONDUCTOR DEVICE TEST METHOD
Document Type and Number:
Japanese Patent JPH04199841
Kind Code:
A
Abstract:

PURPOSE: To perform a conduction test without requiring direct contact with a probe pin by inserting an electrode connected to a semiconductor test system in a conductor to create conduction between a semiconductor device and a semiconductor test system.

CONSTITUTION: A fluid or gel conductor 4 is positioned on top of an electrode 2 of a semiconductor device using surface tension and viscosity. After that, a probe pin 3 is inserted, a connection is made with the circuit in the semiconductor device 1, and a semiconductor test is performed. When the test is finished, the conductor 4 is removed, or after wiring, hardening is achieved by heating. By inserting the electrode 2 of a semiconductor test device 1 and a probe pin 3 in a liquid or gel conductor 4 in this way, the contact surface area increases, the current capacity rises, and since the conductor changes shape in accordance with the shape of the electrode, restrictions on the electrode 2 of the semiconductor device 1 and the edge diameter, shape, material, and hardness of the probe pin 3 can be relieved.


Inventors:
IOKURA OSAMU
Application Number:
JP33615190A
Publication Date:
July 21, 1992
Filing Date:
November 29, 1990
Export Citation:
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Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
H01L21/66; (IPC1-7): H01L21/66
Attorney, Agent or Firm:
Masuo Oiwa (2 outside)