Title:
SEMICONDUCTOR DEVICE TESTING CONTACT AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
Japanese Patent JP2002231399
Kind Code:
A
Abstract:
To provide a contactor capable of putting all contact electrodes in contact with terminals at a proper contact pressure, and to provide its manufacturing method.
The contactor has a plurality of contact electrodes 6 arranged in a prescribed array. Each of the contact electrodes 6 has a contact portion 6c for electrically connecting a contact electrode member 6a for making contact with an electrode 2a of a semiconductor device 2 and a contact electrode member 6b for contacting the terminal of a test board. The contaact electrode 6 is supported in an array form by connecting the connection portion 6c with an insulating contact board 8.
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Inventors:
MARUYAMA SHIGEYUKI
TASHIRO KAZUHIRO
WATANABE NAOYUKI
KOIZUMI DAISUKE
HATAYA TAKAFUMI
YANO EI
TASHIRO KAZUHIRO
WATANABE NAOYUKI
KOIZUMI DAISUKE
HATAYA TAKAFUMI
YANO EI
Application Number:
JP2001027399A
Publication Date:
August 16, 2002
Filing Date:
February 02, 2001
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
G01R1/067; G01R1/073; H01L21/66; H01R33/76; G01R31/26; (IPC1-7): H01R33/76; G01R1/067; G01R1/073; G01R31/26; H01L21/66
Domestic Patent References:
| JPH10255940A | 1998-09-25 | |||
| JPH05121135A | 1993-05-18 | |||
| JPH09184852A | 1997-07-15 | |||
| JPH11176548A | 1999-07-02 | |||
| JPH11345919A | 1999-12-14 | |||
| JP2000124397A | 2000-04-28 | |||
| JP2000241498A | 2000-09-08 |
Attorney, Agent or Firm:
Tadahiko Ito