Title:
SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JP2007005635
Kind Code:
A
Abstract:
To provide a semiconductor device comprising an actuator capable of laterally generating a large displacement.
The semiconductor device comprises a beam part 11 extending in a first direction with its one end fixed by a supporting part 13 and warped by a residual stress from the supporting part, and a piezoelectric part 12 connected to the other end of the beam and extending to a second direction intersecting with the first direction and moving with an applied bias voltage on a level with the substrate and in a direction of the first direction and in the reverse direction of the first direction.
Inventors:
IKEHASHI TAMIO
Application Number:
JP2005185195A
Publication Date:
January 11, 2007
Filing Date:
June 24, 2005
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
H01L41/09; B81B3/00; G01C19/56; G01C19/5755; G01P15/09; H01H57/00; H01L41/08; H01L41/187; H01L41/22; H01L41/312
Domestic Patent References:
| JP2004252337A | 2004-09-09 | |||
| JP2004006588A | 2004-01-08 |
Foreign References:
| US6456420B1 | 2002-09-24 | |||
| WO2003060592A1 | 2003-07-24 |
Attorney, Agent or Firm:
Takehiko Suzue
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Sadao Muramatsu
Ryo Hashimoto
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Sadao Muramatsu
Ryo Hashimoto
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