Title:
SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JP2020150193
Kind Code:
A
Abstract:
To provide a semiconductor device having superior switching characteristics.SOLUTION: A semiconductor device 100 of an embodiment comprises: a first nitride semiconductor layer 3 (channel layer); a second nitride semiconductor layer 4 (barrier layer) placed on the first nitride semiconductor layer 3 and having a larger bandgap than that of the first nitride semiconductor layer 3; a first electrode 5 (source electrode) placed on the second nitride semiconductor layer 4 and electrically connected to the first nitride semiconductor layer 3; a second electrode 7 (drain electrode) placed on the first nitride semiconductor layer 3 and electrically connected to the first nitride semiconductor layer 3; a gate electrode 6 placed between the first electrode 5 and the second electrode 7; a first field plate electrode 8 placed on the second nitride semiconductor layer and having the same height as that of the gate electrode 6; and a second field plate electrode 9 placed between the first field plate electrode 8 and the second electrode 7.SELECTED DRAWING: Figure 1
Inventors:
HUNG HUNG
ISOBE YASUHIRO
YOSHIOKA AKIRA
SUGIYAMA TORU
IWAI MASAAKI
HOSOKAWA TADANORI
ONOMURA MASAAKI
ISOBE YASUHIRO
YOSHIOKA AKIRA
SUGIYAMA TORU
IWAI MASAAKI
HOSOKAWA TADANORI
ONOMURA MASAAKI
Application Number:
JP2019048043A
Publication Date:
September 17, 2020
Filing Date:
March 15, 2019
Export Citation:
Assignee:
TOSHIBA CORP
TOSHIBA ELECTRONIC DEVICES & STORAGE CORP
TOSHIBA ELECTRONIC DEVICES & STORAGE CORP
International Classes:
H01L21/338; H01L21/336; H01L21/337; H01L29/06; H01L29/41; H01L29/778; H01L29/78; H01L29/808; H01L29/812
Domestic Patent References:
| JP2011210752A | 2011-10-20 | |||
| JP2008277604A | 2008-11-13 | |||
| JP2012178416A | 2012-09-13 | |||
| JP2017123432A | 2017-07-13 | |||
| JP2015170821A | 2015-09-28 | |||
| JP2017208379A | 2017-11-24 | |||
| JPH07307349A | 1995-11-21 | |||
| JP2012028423A | 2012-02-09 |
Attorney, Agent or Firm:
Tetsuma Ikegami
Akira Sudo
Masahiro Takashita
Akira Sudo
Masahiro Takashita