Title:
半導体装置
Document Type and Number:
Japanese Patent JP4000815
Kind Code:
B2
Inventors:
Kyoki Asakawa
Tsuneoka Michiro
Takeo Anbo
Tsuneoka Michiro
Takeo Anbo
Application Number:
JP2001320169A
Publication Date:
October 31, 2007
Filing Date:
October 18, 2001
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
H01L21/768; H01L23/12; H01L21/3205; H01L23/52; H01L23/522
Domestic Patent References:
| JP2000507427A | ||||
| JP2001267350A | ||||
| JP2001118957A | ||||
| JP11177247A | ||||
| JP9289214A | ||||
| JP8097557A | ||||
| JP2002050877A |
Attorney, Agent or Firm:
Fumio Iwahashi
Hiroki Naito
Daisuke Nagano
Hiroki Naito
Daisuke Nagano