半導体装置 - Semiconductor Energy Laboratory Co., Ltd.

Title:

半導体装置

Document Type and Number:

Japanese Patent JP4060290

Kind Code:

B2

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Inventors:

Shunpei Yamazaki
Yasuyuki Arai
Satoshi Teramoto

Application Number:

JP2004155791A

Publication Date:

March 12, 2008

Filing Date:

May 26, 2004

Export Citation:

Assignee:

Semiconductor Energy Laboratory Co., Ltd.

International Classes:

H01L21/28; H01L29/786; G02F1/1368; H01L21/20; H01L21/3205; H01L21/336

Domestic Patent References:

Attorney, Agent or Firm:

Hirokuni Kamo

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