Title:
半導体装置
Document Type and Number:
Japanese Patent JP4581853
Kind Code:
B2
Inventors:
Shoichi Okuda
Shingo Ota
Shingo Ota
Application Number:
JP2005165585A
Publication Date:
November 17, 2010
Filing Date:
June 06, 2005
Export Citation:
Assignee:
株式会社デンソー
International Classes:
H01L21/822; H01L21/3205; H01L23/52; H01L27/04
Domestic Patent References:
| JP2004253634A |
Attorney, Agent or Firm:
Akito Tashita