Title:
半導体装置
Document Type and Number:
Japanese Patent JP5493840
Kind Code:
B2
More Like This:
Inventors:
Yamada Tadanori
Application Number:
JP2009295035A
Publication Date:
May 14, 2014
Filing Date:
December 25, 2009
Export Citation:
Assignee:
Fuji Electric Co., Ltd.
International Classes:
H01L29/78; H01L21/822; H01L27/04
Domestic Patent References:
| JP2004319624A | ||||
| JP2000101076A | ||||
| JP3090132U |
Attorney, Agent or Firm:
Yoichi Matsumoto