Title:
Semiconductor device
Document Type and Number:
Japanese Patent JP6001917
Kind Code:
B2
Inventors:
Kazuhiko Fukuda
Nobuaki Asayama
Nobuaki Asayama
Application Number:
JP2012112893A
Publication Date:
October 05, 2016
Filing Date:
May 16, 2012
Export Citation:
Assignee:
Sharp Corporation
International Classes:
H01L21/60
Domestic Patent References:
JP9055404A | ||||
JP2009253120A | ||||
JP2010199191A | ||||
JP2005276865A | ||||
JP7273119A | ||||
JP2003100999A | ||||
JP7263488A |
Foreign References:
US20050098884 |
Attorney, Agent or Firm:
Yoshifumi Masaki
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