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Title:
Semiconductor device
Document Type and Number:
Japanese Patent JP6030200
Kind Code:
B2
Inventors:
Masami Tsuji:
Toshiaki Sawada
Application Number:
JP2015172420A
Publication Date:
November 24, 2016
Filing Date:
September 02, 2015
Export Citation:
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Assignee:
Renesas Electronics Corporation
International Classes:
H01L21/3205; H01L21/768; H01L21/82; H01L21/822; H01L23/522; H01L27/04
Domestic Patent References:
JP2007524991A
JP2004079693A
JP2005109145A
JP2001345381A
JP2007123407A
JP2005019789A
JP2006140300A
Attorney, Agent or Firm:
Tsutsui International Patent Office



 
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