Title:
Semiconductor device
Document Type and Number:
Japanese Patent JP6030200
Kind Code:
B2
More Like This:
Inventors:
Masami Tsuji:
Toshiaki Sawada
Toshiaki Sawada
Application Number:
JP2015172420A
Publication Date:
November 24, 2016
Filing Date:
September 02, 2015
Export Citation:
Assignee:
Renesas Electronics Corporation
International Classes:
H01L21/3205; H01L21/768; H01L21/82; H01L21/822; H01L23/522; H01L27/04
Domestic Patent References:
JP2007524991A | ||||
JP2004079693A | ||||
JP2005109145A | ||||
JP2001345381A | ||||
JP2007123407A | ||||
JP2005019789A | ||||
JP2006140300A |
Attorney, Agent or Firm:
Tsutsui International Patent Office