Title:
Semiconductor device
Document Type and Number:
Japanese Patent JP6132478
Kind Code:
B2
Inventors:
Kohei Ebihara
Shuhei Nakata
Takeshi Kawakami
Masayuki Imaizumi
Shuhei Nakata
Takeshi Kawakami
Masayuki Imaizumi
Application Number:
JP2012107426A
Publication Date:
May 24, 2017
Filing Date:
May 09, 2012
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
H01L29/872; H01L29/06; H01L29/12; H01L29/47; H01L29/78
Domestic Patent References:
| JP2011514674A | ||||
| JP2000150859A | ||||
| JP2011216587A | ||||
| JP2006005275A | ||||
| JP2002334998A | ||||
| JP2012049347A | ||||
| JP7273325A | ||||
| JP8306937A | ||||
| JP2881907B2 |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita
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