Title:
Semiconductor device
Document Type and Number:
Japanese Patent JP6142666
Kind Code:
B2
Inventors:
Takao Yamamoto
Application Number:
JP2013105137A
Publication Date:
June 07, 2017
Filing Date:
May 17, 2013
Export Citation:
Assignee:
株式会社デンソー
International Classes:
H01L29/78; H01L21/336; H01L29/739
Domestic Patent References:
| JP2010045144A | ||||
| JP2001339063A |
Foreign References:
| WO2011080928A1 |
Attorney, Agent or Firm:
Akito Tashita
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