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Title:
Semiconductor device
Document Type and Number:
Japanese Patent JP6171250
Kind Code:
B2
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Inventors:
Masahiro Nishi
Application Number:
JP2013137116A
Publication Date:
August 02, 2017
Filing Date:
June 28, 2013
Export Citation:
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Assignee:
Sumitomo Electric Device Innovation Co., Ltd.
International Classes:
H01L29/41; H01L21/338; H01L29/778; H01L29/812
Domestic Patent References:
JP2007273545A
JP4079317A
JP62066628A
JP2012028641A
Attorney, Agent or Firm:
Shuhei Katayama



 
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