Title:
Semiconductor device
Document Type and Number:
Japanese Patent JP6216418
Kind Code:
B2
Inventors:
Yoshio Noguchi
Mami Yamamoto
Naoya Takai
Mami Yamamoto
Naoya Takai
Application Number:
JP2016144745A
Publication Date:
October 18, 2017
Filing Date:
July 22, 2016
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
H01L31/12
Domestic Patent References:
| JP11274549A | ||||
| JP200564513A | ||||
| JP2002359392A | ||||
| JP6268246A |
Attorney, Agent or Firm:
Takumi Hara
Minoru Watanabe
Takuya Takahashi
Kuniyuki Onishi
Takashi Ishikawa
Minoru Watanabe
Takuya Takahashi
Kuniyuki Onishi
Takashi Ishikawa
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