Title:
半導体装置
Document Type and Number:
Japanese Patent JP6671154
Kind Code:
B2
Abstract:
Provided is an element with stable electrical characteristics or a device including plural kinds of elements with stable electrical characteristics. The semiconductor device includes a first insulator, a transistor over the first insulator, a second insulator over the transistor, and a third insulator over the second insulator. The second insulator includes an opening reaching the first insulator. The opening is filled with a fourth insulator. The first insulator, the third insulator, and the fourth insulator each have a lower hydrogen-transmitting property than the second insulator.
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Inventors:
Shunpei Yamazaki
Application Number:
JP2015229474A
Publication Date:
March 25, 2020
Filing Date:
November 25, 2015
Export Citation:
Assignee:
Semiconductor Energy Laboratory Co., Ltd.
International Classes:
H01L21/336; G02F1/1368; H01L21/28; H01L21/8234; H01L21/8238; H01L21/8239; H01L21/8242; H01L27/06; H01L27/088; H01L27/092; H01L27/105; H01L27/108; H01L27/115; H01L27/1156; H01L29/417; H01L29/423; H01L29/49; H01L29/786; H01L29/788; H01L29/792; H01L51/50; H05B33/14
Domestic Patent References:
| JP2011029176A | ||||
| JP2011119706A | ||||
| JP2015213164A |