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Patent Searching and Data


Title:
SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JPH0575021
Kind Code:
A
Abstract:

PURPOSE: To increase the capacity of a capacitor without causing an increase in an element area and lowering of dielectric strength.

CONSTITUTION: An N-type epitaxial layer 102 is laminated on a P-type semiconductor substrate 100 and further an N+ diffused layer 104 is formed thereon. A dielectric layer 106 of a silicon oxide is formed and a conductive layer 108 of polysilicon is laminated on a region wherein a capacitor is to be formed. Next, a dielectric layer 110 of polysilicon is formed, and after a phosphorus glass PSG layer 112 is applied for coating, a conductive layer 114 of aluminum is laminated and connected to an electrode A. The conductive layer 114 of aluminum and the N+ diffused layer 104 are connected through a contact hole and they are connected to an electrode B. A capacitor 1 of the dielectric layer 106 and a capacitor C2 of the dielectric layer 110 are connected in parallel and the capacity is C1+C2.


Inventors:
KAWAI FUMIAKI
Application Number:
JP23470191A
Publication Date:
March 26, 1993
Filing Date:
September 13, 1991
Export Citation:
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Assignee:
ROHM CO LTD
International Classes:
H01L27/04; H01L21/822; H01L21/8242; H01L27/10; H01L27/108; (IPC1-7): H01L27/04; H01L27/108
Attorney, Agent or Firm:
Kenji Yoshida (2 outside)