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Patent Searching and Data


Title:
SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JPH07268099
Kind Code:
A
Abstract:

PURPOSE: To provide a semiconductor device having a resin layer excellent in adhesion, humidity resistance, heat resistance, etc., and capable of resisting to especially strong hydrofluoric acid etchant by forming a specified polyimide resin layer on the surface of a semiconductor element under specified conditions.

CONSTITUTION: This device is provided by forming a polyimide resin layer prepared by heating for curing a polyamic acid mixture which is prepared by mixing a solution (A) of a polyamic acid obtained by reacting 3,3',4,4'- biphenyltetracarboxylic dianhydride with p-phenylenediamine with a solution (B) of a polyamic acid obtained by reacting pyromellitic dianhydride with 4,4'- diaminodiphenyl ether and in which a diaminosiloxane represented by the formula (wherein R1 and R2 are each a bivalent organic group; R3 to R6 are each a hydrocarbon group, and (n) is 0-12) constitutes 1-30mol% of the diamine components A and/or B, and the content of component B is 20-50wt.% based on the total weight of the polyamic acids, on the surface of a semiconductor device directly or through another insulation layer.


Inventors:
TSUNODA MAYUMI
Application Number:
JP8912294A
Publication Date:
October 17, 1995
Filing Date:
April 04, 1994
Export Citation:
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Assignee:
TOSHIBA CHEM CORP
International Classes:
C08G73/10; H01L21/312; (IPC1-7): C08G73/10; H01L21/312
Attorney, Agent or Firm:
Eiji Morota