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Patent Searching and Data


Title:
SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JPH0945942
Kind Code:
A
Abstract:

To obtain a semiconductor device having electrodes arranged neatly at the positions symmetric to a first diaphragm on the upper surface of an element board on the outside of the first diaphragm.

An element board 2 is provided, in the lower surface thereof, with a first recess 3 having a first circular diaphragm 1 constituting the ceiling part thereof composed of a laminated insulating film 4 of an oxide and a nitride. An infrared detection element 5 is formed on the upper surface of first diaphragm 1. Two electrodes 6 are disposed symmetrically to the center of first diaphragm 1 on the upper surface of element board 2 on the outside of first diaphragm 1. On the other hand, a second recess 10 is made in the lower surface of a sealing board 9 and a second diaphragm 8 is formed at the ceiling part of second recess 10. The sealing board 9 is bonded onto the element board 2 so that the second recess 10 may cover the element 5, thus forming a cavity structure.


Inventors:
KITAYAMA KAZUYA
AIZAWA KOICHI
Application Number:
JP19076895A
Publication Date:
February 14, 1997
Filing Date:
July 26, 1995
Export Citation:
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Assignee:
MATSUSHITA ELECTRIC WORKS LTD
International Classes:
H01L23/02; H01L31/02; H01L37/00; (IPC1-7): H01L31/02; H01L23/02; H01L37/00
Attorney, Agent or Firm:
Ishida Chochichi (2 outside)