Title:
SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JPS5886738
Kind Code:
A
Abstract:
PURPOSE:To obtain a semiconductor device of a multilayer structure which is easy to test, by laminating each layer with the area reduced in stages, and by providing a measuring electrode on the exposed surface of each layer. CONSTITUTION:Epitaxial layers 1-4 whereon circuit elements are formed respectively are laminated in multilayer through the intermediary of insulation layers 5. The area of each layer is reduced in stages, and on the surfaces thus exposed measuring electrodes 1a-4a are provided. A test is conducted by a method wherein a probe 8 connected to a testing device 6 via a relay switch 7 is made to contact with the measuring electrodes. This constitution facilitates the test of each layer and of the whole device.
Inventors:
HAYASAKA YOSHIAKI
Application Number:
JP18601981A
Publication Date:
May 24, 1983
Filing Date:
November 18, 1981
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
H01L27/00; H01L21/66; (IPC1-7): H01L27/12
Attorney, Agent or Firm:
Masuo Oiwa