Title:
半導体装置およびその製造方法
Document Type and Number:
Japanese Patent JP5203896
Kind Code:
B2
Inventors:
Tan Tron Long
Yuji Kuri
Toshiharu Obe
Go Ninomiya
Hiroki Sekiya
Yuji Kuri
Toshiharu Obe
Go Ninomiya
Hiroki Sekiya
Application Number:
JP2008291178A
Publication Date:
June 05, 2013
Filing Date:
November 13, 2008
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
H01L23/40; H01L21/331; H01L29/73
Domestic Patent References:
| JP2005136323A | ||||
| JP2006269702A | ||||
| JP200693733A | ||||
| JP200666465A | ||||
| JP2005244165A | ||||
| JP11214599A | ||||
| JP200666716A | ||||
| JP2007150040A | ||||
| JP2006104495A | ||||
| JP2002168577A |
Attorney, Agent or Firm:
Hidekazu Miyoshi
Iwa Saki Kokuni
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu
Iwa Saki Kokuni
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu